The vibration sensor, which is made with high performance SMR (Semiconductor Magneto Resistance) as smart element, is applied to measure vibration situation and acceleration status. The sensors are small in size, easy to use, and of long life and high resolution and sensitivity. And it can be used in some harsh conditions, such as water, oil, gas and corrosive circumstances. It can also be used as perfect signal source for analyzing vibration and acceleration status, as well as monitoring and diagnosing fault events.